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Tribology Issues and Opportunities in MEMS formatIsbn:Softcover - 9789401061216 Veranstaltung: Industriemeister Druck- und Medientechnik

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Veranstaltung: Industriemeister Druck- und Medientechnik

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Such fundamental concepts are essential for an in-depth understanding of the physicochemical properties of molten salts in general

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Tribology Issues and Opportunities in MEMS formatIsbn:Softcover - 9789401061216 Veranstaltung: Industriemeister Druck- und MedientechnikMicro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about

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